Low-Voltage Aberration-Corrected SEM Metrology of Thin Resist for High-NA EUVL

Zidan, MohamedMohamedZidanFischer, DanielDanielFischerLorusso, GianGianLorussoSeveri, JorenJorenSeveriDe Simone, DaniloDaniloDe SimoneMoussa, AlainAlainMoussaMuellender, AngelikaAngelikaMuellenderMack, Chris A.Chris A.MackCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayDe Gendt, StefanStefanDe Gendt2022-12-192022-09-082022-12-192022978-1-5106-4981-10277-786XWOS:000844549800024https://imec-publications.be/handle/20.500.12860/40376Low-Voltage Aberration-Corrected SEM Metrology of Thin Resist for High-NA EUVLProceedings paper10.1117/12.2613990978-1-5106-4982-8WOS:000844549800024