Richard, OlivierOlivierRichardGeypen, JefJefGeypenFavia, PaolaPaolaFaviaVerleysen, EvelineEvelineVerleysenMarrant, KoenKoenMarrantVan Marcke, PatriciaPatriciaVan MarckeBender, HugoHugoBender2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17881TEM analysis in semiconductor industry: R&D examples of future needsMeeting abstract