Optical characteristics of low-k films and barrier layers in the ultra-violet range

Eslava Fernandez, SalvadorSalvadorEslava FernandezBaklanov, MikhaïlMikhaïlBaklanovFoubert, PhilippePhilippeFoubertEymery, GuillaumeGuillaumeEymeryMaex, KarenKarenMaex2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12133Optical characteristics of low-k films and barrier layers in the ultra-violet rangeProceedings paper