Norris, D.J.D.J.NorrisRoss, I.M.I.M.RossCullis, A.G.A.G.CullisWalther, T.T.WaltherMyronov, M.M.MyronovDobbie, A.A.DobbieWhall, T.T.WhallParker, E.H.C.E.H.C.ParkerLeadley, D.R.D.R.LeadleyDe Jaeger, BriceBriceDe JaegerLee, WillieWillieLeeMeuris, MarcMarcMeuris2021-10-182021-10-1820101742-6588https://imec-publications.be/handle/20.500.12860/17709TEM analysis of Si-passivated Ge-on-Si MOSFET structures for high performance PMOS device technologyJournal article