Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation

Vanhellemont, JanJanVanhellemontKissinger, G.G.KissingerGräf, D.D.GräfKenis, KarineKarineKenisDepas, MichelMichelDepasMertens, PaulPaulMertensLambert, U.U.LambertHeyns, MarcMarcHeynsClaeys, CorCorClaeysRichter, H.H.RichterWagner, P.P.Wagner2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1611Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidationProceedings paper