Veloso, AnabelaAnabelaVelosoAltamirano Sanchez, EfrainEfrainAltamirano SanchezBrus, StephanStephanBrusChan, BTBTChanCupak, MiroslavMiroslavCupakDehan, MorinMorinDehanDelvaux, ChristieChristieDelvauxDevriendt, KatiaKatiaDevriendtEneman, GeertGeertEnemanErcken, MoniqueMoniqueErckenHuynh Bao, TrongTrongHuynh BaoIvanov, TsvetanTsvetanIvanovMatagne, PhilippePhilippeMatagneMerckling, ClementClementMercklingParaschiv, VasileVasileParaschivRamesh, SivaSivaRameshRosseel, ErikErikRosseelRynders, LucLucRyndersSibaja-Hernandez, ArturoArturoSibaja-HernandezSuhard, SamuelSamuelSuhardTao, ZhengZhengTaoVecchio, EmmaEmmaVecchioWaldron, NiamhNiamhWaldronYakimets, DmitryDmitryYakimetsDe Meyer, KristinKristinDe MeyerMocuta, DanDanMocutaCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27510Vertical nanowire FET integration and device aspectsProceedings paperhttp://ecst.ecsdl.org/content/72/4/31.abstract