Rachidi, SanaSanaRachidiRamesh, SivaSivaRameshTierno, DavideDavideTiernoDonadio, Gabriele LucaGabriele LucaDonadioPacco, AntoineAntoinePaccoMaes, J. W.J. W.MaesJeong, YongbinYongbinJeongArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2024-07-122024-07-1220242330-7978WOS:001233896700017https://imec-publications.be/handle/20.500.12860/44148Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND FlashProceedings paper10.1109/IMW59701.2024.10536954979-8-3503-0652-1WOS:001233896700017MOLYBDENUM