Circular MEM resonator: modeling second order effects on resonance frequency

Nada, YasseenYasseenNadaStoffels, SteveSteveStoffelsTilmans, HarrieHarrieTilmansHegazi, E.E.HegaziRagai, H.F.H.F.RagaiShaarawi, A.M.A.M.Shaarawi2021-10-172021-10-172008-04https://imec-publications.be/handle/20.500.12860/14208Circular MEM resonator: modeling second order effects on resonance frequencyProceedings paper