Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range

Rochus, VeroniqueVeroniqueRochusJansen, RoelofRoelofJansenFigeys, BrunoBrunoFigeysVerhaegen, FabianFabianVerhaegenRosseel, RobrectRobrectRosseelMerken, PatrickPatrickMerkenLenci, SilviaSilviaLenciRottenberg, XavierXavierRottenberg2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29307Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure rangeProceedings paperhttp://ieeexplore.ieee.org/document/7994208/