A comparative study of via drilling and scribing on PEN and PET substrates for flexible electronic applications using excimer and Nd:YAG laser sources

Mandamparambil, RajeshRajeshMandamparambilFledderus, HenriHenriFledderusvan den Brand, JeroenJeroenvan den BrandSaalmink, MilanMilanSaalminkKusters, RoelRoelKustersPodprocky, TomasTomasPodprockyVan Steenberge, GeertGeertVan SteenbergeDe Baets, JohanJohanDe BaetsDietzel, AndreasAndreasDietzel2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15809A comparative study of via drilling and scribing on PEN and PET substrates for flexible electronic applications using excimer and Nd:YAG laser sourcesProceedings paper