Geudens, ViktorViktorGeudensNategh, ShahryarShahryarNateghVan Steenberge, GeertGeertVan SteenbergeBelis, JanJanBelisMissinne, JeroenJeroenMissinne2024-05-282023-10-112024-05-2820240030-3992WOS:001074582700001https://imec-publications.be/handle/20.500.12860/42706Laser micromachined 3D glass photonics platform demonstrated by temperature compensated strain sensorJournal article10.1016/j.optlastec.2023.109970WOS:001074582700001GRATING WAVE-GUIDESFEMTOSECOND-LASERFUSED-SILICAWRITTENOPTIMIZATIONFABRICATIONSPLITTERS