Stucchi, MicheleMicheleStucchiPerry, DanielDanielPerryKatti, GuruprasadGuruprasadKattiDehaene, WimWimDehaeneVelenis, DimitriosDimitriosVelenis2021-10-202021-10-2020120894-6507https://imec-publications.be/handle/20.500.12860/21563Test structures for characterization of through-silicon viasJournal article