Group IV Epi processing, evolution in CMOS from 90 to 10nm node

Loo, RogerRogerLooDhayalan, Sathish KumarSathish KumarDhayalanHikavyy, AndriyAndriyHikavyyIke, ShinichiShinichiIkeRondas, DirkDirkRondasRosseel, ErikErikRosseelShimura, YosukeYosukeShimuraSteenbergen, JohnnyJohnnySteenbergenSun, JianwuJianwuSunWang, WeiWeiWangLanger, RobertRobertLanger2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24165Group IV Epi processing, evolution in CMOS from 90 to 10nm nodeProceedings paper