Selective removal of Ni for salicidation and fully silicided gates

Kraus, K.K.KrausFano Leston, V.V.Fano LestonSnow, JimJimSnowXu, KaidongKaidongXude Potter de ten Broeck, MurielMurielde Potter de ten BroeckLauwers, AnneAnneLauwersMertens, PaulPaulMertensKovacs, F.F.Kovacs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10724Selective removal of Ni for salicidation and fully silicided gatesProceedings paper