Modification of photoresist by UV for post-etch wet strip applications

Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersClaes, MartineMartineClaesLux, MarcelMarcelLuxVereecke, GuyGuyVereecke2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14003Modification of photoresist by UV for post-etch wet strip applicationsOral presentation