Khaled, AhmadAhmadKhaledRaoof, MoatassimMoatassimRaoofCherman, VladimirVladimirChermanJans, KarolienKarolienJansAbbas, MohamedMohamedAbbasEbrahim, ShakerShakerEbrahimBryce, GeorgeGeorgeBryceVerheyen, PeterPeterVerheyenWitvrouw, AnnAnnWitvrouwDe Wolf, IngridIngridDe Wolf2021-10-202021-10-2020120026-2714https://imec-publications.be/handle/20.500.12860/20927Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensingJournal articlehttp://dx.doi.org/10.1016/j.micorrel.2012.06.010