Dewetting of patterned silicon substrates leading to a selective deposition of micellar-based nanoparticles

Riskin, A.A.RiskinDe Dobbelaere, C.C.De DobbelaereShan, L.L.ShanBoyen, Hans-GerdHans-GerdBoyenD'Haen, JanJanD'HaenHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-202021-10-2020121932-7447https://imec-publications.be/handle/20.500.12860/21395Dewetting of patterned silicon substrates leading to a selective deposition of micellar-based nanoparticlesJournal article