Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication

Zahedmanesh, HoumanHoumanZahedmaneshVega Gonzalez, VictorVictorVega GonzalezTokei, ZsoltZsoltTokei2022-09-222021-11-022022-09-062022-09-2220212574-0970WOS:000668366800005https://imec-publications.be/handle/20.500.12860/37799Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect FabricationJournal article10.1021/acsanm.1c00773WOS:000668366800005STRESS GENERATIONBRITTLESURFACECOALESCENCECONTACTMODEL