Pfeffer, MarkusMarkusPfefferOechsner, RichardRichardOechsnerPfitzner, LotharLotharPfitznerRyssel, HeinerHeinerRysselOcker, BertholdBertholdOckerVerdonck, PatrickPatrickVerdonck2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14311Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulationProceedings paper