Alagna, PaoloPaoloAlagnaZurita, OmarOmarZuritaLalovic, IvanIvanLalovicSeong, NakgeuonNakgeuonSeongRechsteiner, GregoryGregoryRechsteinerThornes, JoshuaJoshuaThornesD'have, KoenKoenD'haveVan Look, LieveLieveVan LookBekaert, JoostJoostBekaert2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21960Lithography imaging control by enhanced monitoring of light source performanceProceedings paper