Xie, RongsieRongsieXieZhang, CanCanZhangChen, BinganBinganChenZhong, GuofangGuofangZhongRobertson, johnjohnRobertsonvan der Veen, MarleenMarleenvan der Veen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21866Carbon nanotube growth for high aspect ratio interconnect applicationsMeeting abstracthttps://elsevier.conference-services.net/resources/247/3113/pdf/DIAM2012_0451.pdf