Dispersion-free low RF loss GaN-on-Si structures grown on 200 mm Si substrate using MOVPE

Zhao, MingMingZhaoChang, ShaneShaneChangLanger, RobertRobertLangerCollaert, NadineNadineCollaert2021-10-282021-10-282019https://imec-publications.be/handle/20.500.12860/34544Dispersion-free low RF loss GaN-on-Si structures grown on 200 mm Si substrate using MOVPEMeeting abstract