Ge-migration in s-Si-SiGe structures during implantation and annealing

Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensGeenen, LucLucGeenenLoo, RogerRogerLooCaymax, MattyMattyCaymaxDelhougne, RomainRomainDelhougnePawlak, BartekBartekPawlakRavit, ClaireClaireRavit2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11469Ge-migration in s-Si-SiGe structures during implantation and annealingOral presentation