Pantouvaki, MariannaMariannaPantouvakiHumbert, AurelieAurelieHumbertVan Besien, ElsElsVan BesienCamerotto, ElisabethElisabethCamerottoTravaly, YoussefYoussefTravalyRichard, OlivierOlivierRichardWillegems, MyriamMyriamWillegemsVolders, HennyHennyVoldersKellens, KristofKristofKellensDaamen, RoelRoelDaamenHoofman, RomanoRomanoHoofmanBeyer, GeraldGeraldBeyer2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/14267Air-gap formation by UV-assisted decomposition of CVD materialJournal article