Philipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxJonckheere, RikRikJonckheereVandenberghe, GeertGeertVandenbergheDavydova, NataliaNataliaDavydovaFliervoet, TimonTimonFliervoetNeumann, Jens TimoJens TimoNeumann2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21300Impact of mask stack on high NA EUV imagingOral presentationhttps://www.sematech.org/10258