W2W permanent stacking for 3D system integration

Peng, LanLanPengKim, Soon-WookSoon-WookKimSoules, MichaelMichaelSoulesGabriel, MarkusMarkusGabrielZoberbier, MargareteMargareteZoberbierSleeckx, ErikErikSleeckxStruyf, HerbertHerbertStruyfMiller, AndyAndyMillerBeyne, EricEricBeyne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24374W2W permanent stacking for 3D system integrationProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7028287