Impact of LER and random dopant fluctuations on FinFET matching performance

Baravelli, EmanueleEmanueleBaravelliJurczak, GosiaGosiaJurczakSpeciale, N.N.SpecialeDe Meyer, KristinKristinDe MeyerDixit, AbhisekAbhisekDixit2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13337Impact of LER and random dopant fluctuations on FinFET matching performanceJournal article