A wet release process for fabricating slender and compliant suspended micro-mechanical structures

Pamidighantam, SayanuSayanuPamidighantamLaureyn, WimWimLaureynRusu, CristinaCristinaRusuBaert, KrisKrisBaertPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7969A wet release process for fabricating slender and compliant suspended micro-mechanical structuresJournal article