de Marneffe, Jean-FrancoisJean-Francoisde MarneffeLe, Quoc ToanQuoc ToanLeConard, ThierryThierryConardDemuynck, StevenStevenDemuynckStruyf, HerbertHerbertStruyfBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullart2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10305Contact patterning scheme for organo-siloxane Low-k material as pre-metal dielectricProceedings paper