Fabrication of cantilevers and double AFM tips for the nanoprofiler

Duriau, EdouardEdouardDuriauClarysse, TrudoTrudoClarysseHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12111Fabrication of cantilevers and double AFM tips for the nanoprofilerJournal article