Sepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezHellin, DavidDavidHellinZhang, LipingLipingZhangKenis, KarineKarineKenisBatuk, DmitryDmitryBatukBaudot, SylvainSylvainBaudotBriggs, BasoeneBasoeneBriggsMountsier, TomTomMountsierBarla, KathyKathyBarlaMorin, PierrePierreMorinAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2023-06-202023-06-202023-06-2020221369-8001WOS:000788064600005https://imec-publications.be/handle/20.500.12860/41852New bending mode in SAQP Si fins and its mitigationJournal article10.1016/j.mssp.2021.106437WOS:000788064600005