Solid-source doping by using phospho-silicate glass into P-type bulk Si (100) substrate: role of the capping SiO2 barrier

Kikuchi, YoshiakiYoshiakiKikuchiPeter, AntonyAntonyPeterDe Keersgieter, AnAnDe KeersgieterPawlak, BartekBartekPawlakEyben, PierrePierreEybenHoriguchi, NaotoNaotoHoriguchiMocuta, AndaAndaMocuta2021-10-252021-10-2520181071-1023https://imec-publications.be/handle/20.500.12860/31056Solid-source doping by using phospho-silicate glass into P-type bulk Si (100) substrate: role of the capping SiO2 barrierJournal articlehttps://doi.org/10.1116/1.5053455