Effect pf substrate roughness on the nucleation and growth behavior of microwave plasma enhanced CVD diamond films

Mallik, AwadeshAwadeshMallikMary Joy, RaniRaniMary JoyRouzbahani Bayatani, RozitaRozitaRouzbahani BayataniLloret, FernandoFernandoLloretPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33525Effect pf substrate roughness on the nucleation and growth behavior of microwave plasma enhanced CVD diamond filmsOral presentation