Han, HanHanHanHantschel, ThomasThomasHantschelStrakos, LiborLiborStrakosVystavel, TomasTomasVystavelBaryshnikova, MarinaMarinaBaryshnikovaMols, YvesYvesMolsKunert, BernardetteBernardetteKunertLanger, RobertRobertLangerVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-282021-10-2820200304-3991https://imec-publications.be/handle/20.500.12860/35239Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurationsJournal articlehttps://doi.org/10.1016/j.ultramic.2019.112928