Mean free path of electrons in EUV photoresist in the energy range 20 to 450 eV

Fallica, RobertoRobertoFallicaMahne, NicolaNicolaMahneConard, ThierryThierryConardVanleenhove, AnjaAnjaVanleenhoveNannarone, StefanoStefanoNannarone2024-04-152024-04-152023978-1-5106-6103-50277-786XWOS:001022961000010https://imec-publications.be/handle/20.500.12860/43832Mean free path of electrons in EUV photoresist in the energy range 20 to 450 eVProceedings paper10.1117/12.2658310978-1-5106-6104-2WOS:001022961000010