Rottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusJansen, RoelofRoelofJansenRamezani, MalihehMalihehRamezaniSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmans2021-10-202021-10-202012-06https://imec-publications.be/handle/20.500.12860/21433Novel nano-electromechanical relay design procedure for logic and memory applicationsProceedings paper