An interconnect for out-of-plane assembled biomedical probe arrays

Aarts, ArnoArnoAartsPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-172021-10-1720080960-1317https://imec-publications.be/handle/20.500.12860/13273An interconnect for out-of-plane assembled biomedical probe arraysJournal articlehttp://iopscience.iop.org/0960-1317/18/6/064004/pdf/0960-1317_18_6_064004.pdf