Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenJurczak, GosiaGosiaJurczakPawlak, BartekBartekPawlakDuffy, RayRayDuffy2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14704Conformal doping of FINFET's: a fabrication and metrology challengeProceedings paper