Molecular base sensitivity studies of various DUV resists used in semiconductor fabrication

Ruede, DavidDavidRuedeErcken, MoniqueMoniqueErckenBorgers, TomTomBorgers2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5925Molecular base sensitivity studies of various DUV resists used in semiconductor fabricationProceedings paper