Caluwaerts, RudyRudyCaluwaertsVan Hove, MarleenMarleenVan HoveBeyer, GeraldGeraldBeyerHoofman, RomanoRomanoHoofmanStruyf, HerbertHerbertStruyfBrom - Verheyden, GrejaGrejaBrom - VerheydenWaeterloos, JoostJoostWaeterloosTokei, ZsoltZsoltTokeiIacopi, FrancescaFrancescaIacopiCarbonell, LaureLaureCarbonellLe, Quoc ToanQuoc ToanLeDas, ArabindaArabindaDasVos, IngridIngridVosDemuynck, StevenStevenDemuynckMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7272Post patterning meso porosity creation: a potential solution for pore sealingProceedings paper