Baklanov, MikhaïlMikhaïlBaklanovAdelmann, ChristophChristophAdelmannZhao, LarryLarryZhaoDe Gendt, StefanStefanDe Gendt2021-10-222021-10-2220152162-8769https://imec-publications.be/handle/20.500.12860/24962Advanced interconnects: materials, processing, and reliabilityJournal articlehttp://jss.ecsdl.org/content/4/1/Y1?etoc