De Vlaminck, IwijnIwijnDe VlaminckRoels, JorisJorisRoelsTaillaert, DirkDirkTaillaertVan Thourhout, DriesDriesVan ThourhoutLagae, LiesbetLiesbetLagaeBaets, RoelRoelBaetsBorghs, GustaafGustaafBorghs2021-10-162021-10-162007-02https://imec-publications.be/handle/20.500.12860/11989Integrated nanomechanical motion detection by means of optical evanescent wave couplingProceedings paper