Chery, EmmanuelEmmanuelCheryCroes, KristofKristofCroes2023-07-252023-03-292023-05-252023-07-252023-061047-4838WOS:000944096100005https://imec-publications.be/handle/20.500.12860/41398Low-Temperature Oxidation Kinetics of Polymer-Embedded ECD CopperJournal article10.1007/s11837-023-05727-4WOS:000944096100005CU THIN-FILMSSHEET RESISTANCESELF-DIFFUSIONOXIDE-FILMSBEHAVIORMECHANISMBARRIERSURFACEGROWTHMODEL