Optimised diode assessment of the surface and bulk generation/recombination properties of silicon substrates

Simoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiClaeys, CorCorClaeysCzerwinski, A.A.CzerwinskiKatcki, J.J.Katcki2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2954Optimised diode assessment of the surface and bulk generation/recombination properties of silicon substratesProceedings paper