La Manna, AntonioAntonioLa MannaVelenis, DimitriosDimitriosVelenisBuisson, ThibaultThibaultBuissonDetalle, MikaelMikaelDetalleRebibis, Kenneth JuneKenneth JuneRebibisZhang, WenqiWenqiZhangBeyne, EricEricBeyne2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/209763D stacking using ultra thin diesProceedings paper