Iacopi, FrancescaFrancescaIacopiPatz, MichaelMichaelPatzVos, IngridIngridVosTokei, ZsoltZsoltTokeiSijmus, BramBramSijmusLe, Quoc ToanQuoc ToanLeSleeckx, ErikErikSleeckxEyckens, BrendaBrendaEyckensStruyf, HerbertHerbertStruyfDas, ArabindaArabindaDasMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7676Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performanceJournal article