Altamirano Sanchez, EfrainEfrainAltamirano SanchezVandeweyer, TomTomVandeweyerDemand, MarcMarcDemandBoullart, WernerWernerBoullart2021-10-212021-10-212013-09https://imec-publications.be/handle/20.500.12860/21968Dry etching patterning requirements for multi-gate devicesBook chapterhttp://www.panstanford.com/books/9789814364027.html#toc