Cobalt UBM for fine pitch microbump applications in 3DIC

Derakhshandeh, JaberJaberDerakhshandehDe Preter, IngeIngeDe PreterVandersmissen, KevinKevinVandersmissenDictus, DriesDriesDictusDi Piazza, LucaLucaDi PiazzaHou, LinLinHouGuerrieri, StefanoStefanoGuerrieriVakanas, GeorgeGeorgeVakanasArmini, SilviaSilviaArminiDaily, RobertRobertDailyLesniewska, AlicjaAlicjaLesniewskaVandelaer, YannickYannickVandelaerVan De Peer, MyriamMyriamVan De PeerSlabbekoorn, JohnJohnSlabbekoornRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25192Cobalt UBM for fine pitch microbump applications in 3DICProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325652