Snow, JimJimSnowFyen, WimWimFyenMertens, PaulPaulMertensKraus, HaraldHaraldKrausKovacs, F.F.KovacsVermeyen, K.K.Vermeyen2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9615Removing metal gate process residuesJournal article