Lorusso, GianGianLorussoRutigliani, VitoVitoRutiglianiVan Roey, FriedaFriedaVan RoeyMack, ChrisChrisMack2021-10-252021-10-2520180167-9317https://imec-publications.be/handle/20.500.12860/31239Unbiased roughness measurements: Subtracting out SEM effectsJournal articlehttps://www.sciencedirect.com/science/article/abs/pii/S0167931718300169